[SawMark]-Solar Cell 전공정(Front End)의 Wafer 검사 S/W

 

SawMark_passKey Benefits[English]  

  • British Standard BS EN50513 표준 만족
  • Solar cell 전 공정(Front End)의 wafer 검사 S/W
  • Wafer 표면의 Step, Groove, Slope Type 결함을 검출하여 양불 판정
  • 검사된 모든 Wafer의 Profile 과 검사 결과를 저장하여 QC에 활용 가능
  • 저장된 Profile 을 이용한 검사 simulation

 

 

Spec.

 Item Specification Note
Defect Type Step / Groove / Slope
Sensor Type 비접촉 광학식
검출 성능 5㎕ 이상
Throughput 3600 / hour

 

Applicable Solar Wafer

Item Detail
Wafer types Mono Crystal / Multi Cristal
Size 5”(125 x 125) / 6”(156 x 156)
Slicing Method Slurry wire cut


System Configuration

  • SawMark S/W (CD)
  • Manual

 

User Interface

Main_frame

 < SawMark >


Defect Image

SawMark_pass SawMark_fail
< defect Image > < defect Image >

 


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